A general model for nano-cantilever switches with consideration of surface effects and nonlinear curvature

A general model for nano-cantilever switches with consideration of surface stress, nonlinear curvature, the location and length of the fixed electrode is developed. Some representative cantilever switch architectures are incorporated into this model. The governing equation is derived by using Hamilton principal and solved numerical. Results show that the influence of nonlinear curvature and surface effect on the pull-in instability and free vibration is significant for a switch with a large gap-length ratio and a short fixed electrode (the length of the fixed electrode is smaller than that of the cantilever nanobeam). The length and position of the fixed electrode have a significant effect on the pull-in parameters.