Accurate and fast computation of transmission cross coefficients

Ştefan Apostol; Paul Hurley; Radu Cristian Ionescu

doi:10.1117/12.2085756

Accurate and fast computation of transmission cross coefficients

Ştefan Apostol, Paul Hurley, Radu Cristian Ionescu

Research output: Chapter in Book / Conference Paper › Conference Paper › peer-review

6 Citations (Scopus)

Abstract

Precise and fast computation of aerial images are essential. Typical lithographic simulators employ a Köhler illumination system for which aerial imagery is obtained using a large number of Transmission Cross Coefficients (TCCs). These are generally computed by a slow numerical evaluation of a double integral. We review the general framework in which the 2D imagery is solved and then propose a fast and accurate method to obtain the TCCs. We acquire analytical solutions and thus avoid the complexity-accuracy trade-off encountered with numerical integration. Compared to other analytical integration methods, the one presented is faster, more general and more tractable.

Original language	English
Title of host publication	Optical Microlithography XXVIII
Editors	Kafai Lai, Andreas Erdmann
Publisher	SPIE
ISBN (Electronic)	9781628415285
DOIs	https://doi.org/10.1117/12.2085756
Publication status	Published - 2015
Externally published	Yes
Event	Optical Microlithography XXVIII - San Jose, United States Duration: 24 Feb 2015 → 26 Feb 2015

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	9426
ISSN (Print)	0277-786X
ISSN (Electronic)	1996-756X

Conference

Conference	Optical Microlithography XXVIII
Country/Territory	United States
City	San Jose
Period	24/02/15 → 26/02/15

Bibliographical note

Publisher Copyright:
© 2015 SPIE.

Access to Document

10.1117/12.2085756

Cite this

@inproceedings{bea5b157327245969ca12e206975b6d3,

title = "Accurate and fast computation of transmission cross coefficients",

abstract = "Precise and fast computation of aerial images are essential. Typical lithographic simulators employ a K{\"o}hler illumination system for which aerial imagery is obtained using a large number of Transmission Cross Coefficients (TCCs). These are generally computed by a slow numerical evaluation of a double integral. We review the general framework in which the 2D imagery is solved and then propose a fast and accurate method to obtain the TCCs. We acquire analytical solutions and thus avoid the complexity-accuracy trade-off encountered with numerical integration. Compared to other analytical integration methods, the one presented is faster, more general and more tractable.",

author = "{\c S}tefan Apostol and Paul Hurley and Ionescu, {Radu Cristian}",

note = "Publisher Copyright: {\textcopyright} 2015 SPIE.; Optical Microlithography XXVIII ; Conference date: 24-02-2015 Through 26-02-2015",

year = "2015",

doi = "10.1117/12.2085756",

language = "English",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

publisher = "SPIE",

editor = "Kafai Lai and Andreas Erdmann",

booktitle = "Optical Microlithography XXVIII",

}

Apostol, Ş, Hurley, P & Ionescu, RC 2015, Accurate and fast computation of transmission cross coefficients. in K Lai & A Erdmann (eds), Optical Microlithography XXVIII., 94261Z, Proceedings of SPIE - The International Society for Optical Engineering, vol. 9426, SPIE, Optical Microlithography XXVIII, San Jose, United States, 24/02/15. https://doi.org/10.1117/12.2085756

Accurate and fast computation of transmission cross coefficients. / Apostol, Ştefan; Hurley, Paul; Ionescu, Radu Cristian.
Optical Microlithography XXVIII. ed. / Kafai Lai; Andreas Erdmann. SPIE, 2015. 94261Z (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 9426).

Research output: Chapter in Book / Conference Paper › Conference Paper › peer-review

TY - GEN

T1 - Accurate and fast computation of transmission cross coefficients

AU - Apostol, Ştefan

AU - Hurley, Paul

AU - Ionescu, Radu Cristian

PY - 2015

Y1 - 2015

N2 - Precise and fast computation of aerial images are essential. Typical lithographic simulators employ a Köhler illumination system for which aerial imagery is obtained using a large number of Transmission Cross Coefficients (TCCs). These are generally computed by a slow numerical evaluation of a double integral. We review the general framework in which the 2D imagery is solved and then propose a fast and accurate method to obtain the TCCs. We acquire analytical solutions and thus avoid the complexity-accuracy trade-off encountered with numerical integration. Compared to other analytical integration methods, the one presented is faster, more general and more tractable.

AB - Precise and fast computation of aerial images are essential. Typical lithographic simulators employ a Köhler illumination system for which aerial imagery is obtained using a large number of Transmission Cross Coefficients (TCCs). These are generally computed by a slow numerical evaluation of a double integral. We review the general framework in which the 2D imagery is solved and then propose a fast and accurate method to obtain the TCCs. We acquire analytical solutions and thus avoid the complexity-accuracy trade-off encountered with numerical integration. Compared to other analytical integration methods, the one presented is faster, more general and more tractable.

UR - http://www.scopus.com/inward/record.url?scp=84931294607&partnerID=8YFLogxK

U2 - 10.1117/12.2085756

DO - 10.1117/12.2085756

M3 - Conference Paper

AN - SCOPUS:84931294607

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Optical Microlithography XXVIII

A2 - Lai, Kafai

A2 - Erdmann, Andreas

PB - SPIE

T2 - Optical Microlithography XXVIII

Y2 - 24 February 2015 through 26 February 2015

ER -

Accurate and fast computation of transmission cross coefficients

Abstract

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Conference

Bibliographical note

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