Electron beam lithography of polymethyl methacrylate films on indium-tin oxide coated glass

Nicholas Stokes; Richard Wuhrer; Andrew McDonagh; Michael Cortie

Electron beam lithography of polymethyl methacrylate films on indium-tin oxide coated glass

Nicholas Stokes, Richard Wuhrer, Andrew McDonagh, Michael Cortie

Research output: Chapter in Book / Conference Paper › Conference Paper

Original language	English
Title of host publication	The 20th Australian Conference on Microscopy and Microanalysis and the 4th Congress of the International Union of Microbeam Analysis Societies: Through the Looking Glass, Sunday 10th - Friday 15th February, 2008, Perth Convention Centre, Perth, Western Australia, Australia: Proceedings
Publisher	Australian Microscopy and Microanalysis Society Inc.
Pages	443-444
Number of pages	2
ISBN (Print)	9781740521604
Publication status	Published - 2008
Event	Australian Conference on Microscopy and Microanalysis - Duration: 10 Feb 2008 → …

Conference

Conference	Australian Conference on Microscopy and Microanalysis
Period	10/02/08 → …

Keywords

lithography, electron beam

Cite this

Stokes, N., Wuhrer, R., McDonagh, A., & Cortie, M. (2008). Electron beam lithography of polymethyl methacrylate films on indium-tin oxide coated glass. In The 20th Australian Conference on Microscopy and Microanalysis and the 4th Congress of the International Union of Microbeam Analysis Societies: Through the Looking Glass, Sunday 10th - Friday 15th February, 2008, Perth Convention Centre, Perth, Western Australia, Australia: Proceedings (pp. 443-444). Australian Microscopy and Microanalysis Society Inc..

Stokes, Nicholas ; Wuhrer, Richard ; McDonagh, Andrew et al. / Electron beam lithography of polymethyl methacrylate films on indium-tin oxide coated glass. The 20th Australian Conference on Microscopy and Microanalysis and the 4th Congress of the International Union of Microbeam Analysis Societies: Through the Looking Glass, Sunday 10th - Friday 15th February, 2008, Perth Convention Centre, Perth, Western Australia, Australia: Proceedings. Australian Microscopy and Microanalysis Society Inc., 2008. pp. 443-444

@inproceedings{3b06e27b58a241beba46ff5f06282846,

title = "Electron beam lithography of polymethyl methacrylate films on indium-tin oxide coated glass",

keywords = "lithography, electron beam",

author = "Nicholas Stokes and Richard Wuhrer and Andrew McDonagh and Michael Cortie",

year = "2008",

language = "English",

isbn = "9781740521604",

pages = "443--444",

booktitle = "The 20th Australian Conference on Microscopy and Microanalysis and the 4th Congress of the International Union of Microbeam Analysis Societies: Through the Looking Glass, Sunday 10th - Friday 15th February, 2008, Perth Convention Centre, Perth, Western Australia, Australia: Proceedings",

publisher = "Australian Microscopy and Microanalysis Society Inc.",

note = "Australian Conference on Microscopy and Microanalysis ; Conference date: 10-02-2008",

}

Stokes, N, Wuhrer, R, McDonagh, A & Cortie, M 2008, Electron beam lithography of polymethyl methacrylate films on indium-tin oxide coated glass. in The 20th Australian Conference on Microscopy and Microanalysis and the 4th Congress of the International Union of Microbeam Analysis Societies: Through the Looking Glass, Sunday 10th - Friday 15th February, 2008, Perth Convention Centre, Perth, Western Australia, Australia: Proceedings. Australian Microscopy and Microanalysis Society Inc., pp. 443-444, Australian Conference on Microscopy and Microanalysis, 10/02/08.

Electron beam lithography of polymethyl methacrylate films on indium-tin oxide coated glass. / Stokes, Nicholas; Wuhrer, Richard; McDonagh, Andrew et al.
The 20th Australian Conference on Microscopy and Microanalysis and the 4th Congress of the International Union of Microbeam Analysis Societies: Through the Looking Glass, Sunday 10th - Friday 15th February, 2008, Perth Convention Centre, Perth, Western Australia, Australia: Proceedings. Australian Microscopy and Microanalysis Society Inc., 2008. p. 443-444.

Research output: Chapter in Book / Conference Paper › Conference Paper

TY - GEN

T1 - Electron beam lithography of polymethyl methacrylate films on indium-tin oxide coated glass

AU - Stokes, Nicholas

AU - Wuhrer, Richard

AU - McDonagh, Andrew

AU - Cortie, Michael

PY - 2008

Y1 - 2008

KW - lithography, electron beam

UR - http://handle.uws.edu.au:8081/1959.7/527674

UR - http://microscopy.org.au/acmm20/

M3 - Conference Paper

SN - 9781740521604

SP - 443

EP - 444

BT - The 20th Australian Conference on Microscopy and Microanalysis and the 4th Congress of the International Union of Microbeam Analysis Societies: Through the Looking Glass, Sunday 10th - Friday 15th February, 2008, Perth Convention Centre, Perth, Western Australia, Australia: Proceedings

PB - Australian Microscopy and Microanalysis Society Inc.

T2 - Australian Conference on Microscopy and Microanalysis

Y2 - 10 February 2008

ER -

Stokes N, Wuhrer R, McDonagh A, Cortie M. Electron beam lithography of polymethyl methacrylate films on indium-tin oxide coated glass. In The 20th Australian Conference on Microscopy and Microanalysis and the 4th Congress of the International Union of Microbeam Analysis Societies: Through the Looking Glass, Sunday 10th - Friday 15th February, 2008, Perth Convention Centre, Perth, Western Australia, Australia: Proceedings. Australian Microscopy and Microanalysis Society Inc. 2008. p. 443-444

Electron beam lithography of polymethyl methacrylate films on indium-tin oxide coated glass

Conference

Keywords

Other files and links

Cite this