Fabrication of polycrystalline aluminum oxide thin films via hydrolysis and hydrothermal reactions in solutions

XiaoFei Duan, Irving Liaw, Nguyen H. Tran, Robert N. Lamb

    Research output: Contribution to journalArticlepeer-review

    Abstract

    Polycrystalline Al2O3 thin films were fabricated through a method combining urea hydrolysis and hydrothermal reactions. The overall growth temperature of these films was achieved as low as 150°C. Although cracks occurred across the gel film after hydrolysis, a subsequent nucleation under elevated pressure and temperature resulted in a closely packed morphology. Moreover, the hydrothermal treatment led to high oxide content and an increase in crystallinity within the films.
    Original languageEnglish
    Pages (from-to)25-29
    Number of pages5
    JournalThin Solid Films
    Volume520
    Issue number1
    DOIs
    Publication statusPublished - 2011

    Keywords

    • aluminum oxide
    • hydrolysis
    • hydrothermal alteration
    • polycrystals
    • thin films
    • urea

    Fingerprint

    Dive into the research topics of 'Fabrication of polycrystalline aluminum oxide thin films via hydrolysis and hydrothermal reactions in solutions'. Together they form a unique fingerprint.

    Cite this