Abstract
Polycrystalline Al2O3 thin films were fabricated through a method combining urea hydrolysis and hydrothermal reactions. The overall growth temperature of these films was achieved as low as 150°C. Although cracks occurred across the gel film after hydrolysis, a subsequent nucleation under elevated pressure and temperature resulted in a closely packed morphology. Moreover, the hydrothermal treatment led to high oxide content and an increase in crystallinity within the films.
Original language | English |
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Pages (from-to) | 25-29 |
Number of pages | 5 |
Journal | Thin Solid Films |
Volume | 520 |
Issue number | 1 |
DOIs | |
Publication status | Published - 2011 |
Keywords
- aluminum oxide
- hydrolysis
- hydrothermal alteration
- polycrystals
- thin films
- urea