Fluorine passivation of defects and interfaces in crystalline silicon

Defects and impurities in silicon limit carrier lifetimes and the performance of solar cells. This work explores the use of fluorine to passivate defects in silicon for solar cell applications. We present a simple method to incorporate fluorine atoms into the silicon bulk and interfaces by annealing samples coated with thin thermally evaporated fluoride overlayers. It is found that fluorine incorporation does not only improve interfaces but can also passivate bulk defects in silicon. The effect of fluorination is observed to be comparable to hydrogenation, in passivating grain boundaries in multicrystalline silicon, improving the surface passivation quality of phosphorus-doped poly-Si-based passivating contact structures, and recovering boron−oxygen-related light-induced degradation in borondoped Czochralski-grown silicon. Our results highlight the possibility to passivate defects in silicon without using hydrogen and to combine fluorination and hydrogenation to further improve the overall passivation effect, providing new opportunities to improve solar cell performance.