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Growth of high quality AlN films on CVD diamond by RF reactive magnetron sputtering
Liang-xian Chen, Hao Liu, Sheng Liu, Cheng-ming Li, Yi-chao Wang, Kang An, Chen-yi Hua, Jin-long Liu, Jun-jun Wei, Li-fu Hei, Fan-xiu Lv
Research output: Contribution to journal › Article › peer-review