Improvement of flow strength and scratch resistance of Ti/Cu nanocrystalline metal multilayer thin films by tailoring layer thickness and modulation ratio

Haoruo Zhou; Li Chang; Kunkun Fu; Hao Huang; Ranming Niu; Xiaozhou Liao; Leigh Sheppard; Laurel George; Ludvik Martinu

doi:10.1016/j.surfcoat.2020.126461

Improvement of flow strength and scratch resistance of Ti/Cu nanocrystalline metal multilayer thin films by tailoring layer thickness and modulation ratio

Haoruo Zhou, Li Chang, Kunkun Fu, Hao Huang, Ranming Niu, Xiaozhou Liao, Leigh Sheppard, Laurel George, Ludvik Martinu

Western Sydney University

Research output: Contribution to journal › Article › peer-review

10 Citations (Scopus)

Abstract

In this work, nanocrystalline Ti/Cu multilayer thin films were fabricated using direct current magnetron sputtering with different layer thicknesses, namely 250, 100, 50, 25 and 5 nm. Additionally, a group of the film specimens were prepared with various modulation ratios where each bilayer was set to 100 nm. The size-dependent deformation behavior of the films was studied using the nano-indentation and nano-scratching techniques. The results showed that the flow strength of the films tended to increase as the layer thickness decreased. Moreover, the strength and scratch resistance of the films can be further enhanced by tailoring the thicknesses of two adjacent layers, while keeping the thickness of each bilayer unchanged. Finally, the size-dependent strengthening mechanism was discussed by recourse to microscopic examination.

Original language	English
Article number	126461
Number of pages	9
Journal	Surface and Coatings Technology
Volume	404
DOIs	https://doi.org/10.1016/j.surfcoat.2020.126461
Publication status	Published - 2020

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10.1016/j.surfcoat.2020.126461

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title = "Improvement of flow strength and scratch resistance of Ti/Cu nanocrystalline metal multilayer thin films by tailoring layer thickness and modulation ratio",

abstract = "In this work, nanocrystalline Ti/Cu multilayer thin films were fabricated using direct current magnetron sputtering with different layer thicknesses, namely 250, 100, 50, 25 and 5 nm. Additionally, a group of the film specimens were prepared with various modulation ratios where each bilayer was set to 100 nm. The size-dependent deformation behavior of the films was studied using the nano-indentation and nano-scratching techniques. The results showed that the flow strength of the films tended to increase as the layer thickness decreased. Moreover, the strength and scratch resistance of the films can be further enhanced by tailoring the thicknesses of two adjacent layers, while keeping the thickness of each bilayer unchanged. Finally, the size-dependent strengthening mechanism was discussed by recourse to microscopic examination.",

author = "Haoruo Zhou and Li Chang and Kunkun Fu and Hao Huang and Ranming Niu and Xiaozhou Liao and Leigh Sheppard and Laurel George and Ludvik Martinu",

year = "2020",

doi = "10.1016/j.surfcoat.2020.126461",

language = "English",

volume = "404",

journal = "Surface and Coatings Technology",

issn = "0257-8972",

publisher = "Elsevier SA",

}

TY - JOUR

T1 - Improvement of flow strength and scratch resistance of Ti/Cu nanocrystalline metal multilayer thin films by tailoring layer thickness and modulation ratio

AU - Zhou, Haoruo

AU - Chang, Li

AU - Fu, Kunkun

AU - Huang, Hao

AU - Niu, Ranming

AU - Liao, Xiaozhou

AU - Sheppard, Leigh

AU - George, Laurel

AU - Martinu, Ludvik

PY - 2020

Y1 - 2020

N2 - In this work, nanocrystalline Ti/Cu multilayer thin films were fabricated using direct current magnetron sputtering with different layer thicknesses, namely 250, 100, 50, 25 and 5 nm. Additionally, a group of the film specimens were prepared with various modulation ratios where each bilayer was set to 100 nm. The size-dependent deformation behavior of the films was studied using the nano-indentation and nano-scratching techniques. The results showed that the flow strength of the films tended to increase as the layer thickness decreased. Moreover, the strength and scratch resistance of the films can be further enhanced by tailoring the thicknesses of two adjacent layers, while keeping the thickness of each bilayer unchanged. Finally, the size-dependent strengthening mechanism was discussed by recourse to microscopic examination.

AB - In this work, nanocrystalline Ti/Cu multilayer thin films were fabricated using direct current magnetron sputtering with different layer thicknesses, namely 250, 100, 50, 25 and 5 nm. Additionally, a group of the film specimens were prepared with various modulation ratios where each bilayer was set to 100 nm. The size-dependent deformation behavior of the films was studied using the nano-indentation and nano-scratching techniques. The results showed that the flow strength of the films tended to increase as the layer thickness decreased. Moreover, the strength and scratch resistance of the films can be further enhanced by tailoring the thicknesses of two adjacent layers, while keeping the thickness of each bilayer unchanged. Finally, the size-dependent strengthening mechanism was discussed by recourse to microscopic examination.

UR - https://hdl.handle.net/1959.7/uws:61515

U2 - 10.1016/j.surfcoat.2020.126461

DO - 10.1016/j.surfcoat.2020.126461

M3 - Article

SN - 0257-8972

VL - 404

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

M1 - 126461

ER -

Improvement of flow strength and scratch resistance of Ti/Cu nanocrystalline metal multilayer thin films by tailoring layer thickness and modulation ratio

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