Reactive sputtered TixNbyNz thin films. I : basic processing relationships

L. R. Sheppard, H. Zhang, R. Liu, S. Macartney, T. Murphy, R. Wuhrer

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Reactive sputtered TixNbyNz thin films. I : basic processing relationships'. Together they form a unique fingerprint.

Engineering

Material Science