Shortcomings in low-energy x-ray quantification using proportional counters in WDS

Many analytical techniques have had mechanical, electronic, and algorithmic improvements since their introduction, which have led to increased analytical and quantitative performances. The EDS system has been improved by changing the front contact layer of the sensor for superior low-energy x-ray sensitivity, the technology to silicon-drift for increased speed of acquisition, and the window material from Beryllium for low-energy performance [1]. However, the EM Probe (EPMA) wavelength spectroscopy (WDS) has had few improvements with the proportional counter (PC) over the last 60 years, especially for low-energy x-rays (LEX).